منابع مشابه
COMPARISON OF PROPERTIES OF TiN/TiCN AND PLASMA NITRIDING/TiCN FILMS DEPOSITED ON THE TOOL STEEL BY PULSED DC- PACVD
In this work, TiN/TiCN & PN/TiCN multilayer films were deposited by plasma- assisted chemical vapour deposition (PACVD). Plasma nitriding (PN) and TiN intermediate layer prior to coating leads to appropriate hardness gradient and it can greatly improve the mechanical properties of the coating. The composition, crystalline structure and phase of the films were investigated by X-ray d...
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AlNxOy thin films were produced by DC reactive magnetron sputtering, using an atmosphere of argon and a reactive gas mixture of nitrogen and oxygen, for a wide range of partial pressures of reactive gas. During the deposition, the discharge current was kept constant and the discharge parameters were monitored. The deposition rate, chemical composition, morphology, structure and electrical resis...
متن کاملSuperhard NbB2-x thin films deposited by dc magnetron sputtering
We have deposited weakly textured substoichiometric NbB2-x thin films by magnetron sputtering from a NbB2 target. The films exhibit superhardness (42 ± 4 GPa), previously only observed in overstoichiometric TiB2 thin films, and explained by a self-organized nanostructuring, where thin TiB2 columnar grains hinder nucleation and slip of dislocations and a B-rich tissue phase between the grains pr...
متن کاملEvaluation of tribological properties of (Ti,Al)CN/DLC composite coatings deposited by cathodic arc method.
In this study, Ti, Al and N doped DLC – referred to here after as “(Ti,Al)CN/DLC composite”- coating and pure diamond-like coating (DLC) were produced by cathodic arc deposition technique and the effects of the coating thickness on their tribological properties were evaluated. The coatings were characterized, using scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffrac...
متن کاملThick DLC Films Deposited By PECVD on the Internal Surface of Cylindrical Substrates
A new and exciting technique for performing DLC deposition on the inside of cylindrical substrates, in particular pipes, will be described. Using the hollow cathode effect (HCE), a high density plasma can be generated within such cylindrical substrates by using Plasma Enhanced Chemical Vapor Deposition (PECVD). As the pipe itself is the vacuum chamber, such high density plasmas can be maintaine...
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ژورنال
عنوان ژورنال: Acta Polytechnica
سال: 2003
ISSN: 1805-2363,1210-2709
DOI: 10.14311/398